Moscow, Russian Federation
employee
Mogilev, Belarus
Moskva, Moscow, Russian Federation
Moskva, Moscow, Russian Federation
The investigation results on the deconvolution of a signal from the measuring section of an induction sensor that allows using it for monitoring and control of processing in a glow discharge in controlled processing environment with the purpose of optimization and results reproducibility in automated processing environment are presented. The induction sensor use allows defining the impact of changes in a form and amplitude of recorded electromagnetic pulses upon changes of the mean-integral value of current in a discharge and also defining time of a plant operation mode setting and also performing a rapid impact upon a process and controlling its completion.
plasma, glow discharge, deconvolution, automated processing environment, vacuum plants
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