TY  JOUR
TI  Identification of induction sensor model and deconvolution  of input signal spectrum
KW  plasma
KW  glow discharge
KW  deconvolution
KW  automated processing environment
KW  vacuum plants
JO  Science intensive technologies in mechanical engineering
AU  Dosko, S.I.
AU  Logvin, V.A.
AU  Sheptunov, S.A.
AU  Yuganov, E.V.
PY  2018
IS  2018
PB  Bryansk State Technical University