%0 Journal Article %T Identification of induction sensor model and deconvolution of input signal spectrum %A Dosko, S.I. %A Logvin, V.A. %A Sheptunov, S.A. %A Yuganov, E.V. %K plasma, glow discharge, deconvolution, automated processing environment, vacuum plants %J Science intensive technologies in mechanical engineering %D 2018 %N 2018 %P 6 %I Bryansk State Technical University