Abstract and keywords
Abstract (English):
mechanical processing of ceramic materials in practice is a complex technological task, due to the high hardness and increased brittleness of the processed material. High-quality, high-performance grinding of ceramics requires a reasonable selection of operating parameters of the technological process, as well as the identification of factors that violate the integrity of the surface and deep layers of the processed material, which, in turn, will meet the high requirements for the production of batches of suitable semiconductor products. The author of scientific research performed a series of experiments on processing silicon carbide plates with varying cutting modes and conditions. The obtained research results will serve as a basis for the formulation and promotion of individual recommendations for the treatment of silicon carbide structures with the required quality of the surface layer at the proper level of productivity of the technological process.

silicon carbide abrasive processing, the quality of the surface structures

1. Bishutin, S.G. Sovershenstvovanie tehnologii finishnoy abrazivnoy obrabotki plastin iz karbida kremniya/ S.G. Bishutin, S.S. Alehin// Vestnik Bryanskogo gosudarstvennogo tehnicheskogo universiteta. – 2018. – №5(66). – S. 9-13.

2. Alehin S.C. Formirovanie mikrotreschin v poverhnostnyh sloyah karbidokremnievyh plastin pri finishnoy abrazivnoy obrabotke// LVII Mezhdunarodnye nauchnye chteniya (pamyati B.G. Galerkina) – Moskva: EFIR,2019. – 98 c.

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