One of the ways allowing the increase of accuracy and control devices potentialities consists in the use of system complexes investigating a holographic image of an object under control. The design peculiarities of system complexes of this set allow using module-geometrical approach for the simulation of a surface investigated. The modulegeometrical approach allows, in its turn, obtaining the topography of a microrelief with an analytical description and conservation of a natural surface curvature and also a threedimensional model of an aerohydrodynamic surface with a complex shape which is a smooth module connection having also an analytical presentation. To obtain a holographic image of an object which allows fixing geometrical characteristics in a nanointerval are used the circuits of image recording through Leight-Upatnieks method. There is developed and approbated an optical circuit of a profilograph scanning a holographic image of an object in a visible interval of electro-magnetic waves and allowing the reception of surface characteristic for structuring its threedimensional model on the basis of a modulegeometrical approach. The circuit of a roentgenoprofilograph for active control of microrelief formation is developed.
optical circuit, profilograph, roentgeno-profilograph, microrelief topography, holographic control
1. Belkin, Е.А. Profilographs of new generation based on holography / Е.А. Belkin, V.N. Poyarkov // Scientific Review. - 2015. - №12. - pp. 205-208.
2. Belkin, Е.А. Holographic profilograph with passive control / Е.А. Belkin, V.N. Poyarkov //Science, Education, Society: Trends and Prospects: Proceedings of the Inter. Scientific-Pract. Conf. - М.: АР-Consult, 2013. - Vol. II. - pp. 33-35.
3. Belkin, Inspection tools for control of microrelief formation process / E.A. Belkin, V.N. Poyrkov // Science, Education, Society: Current Challenges Prospects: Proceedings of the Inter. Pract. Conf. - М.: АР-Consult, 2013. - Vol. II. - pp. 117-119.
4. Belkin , Е.А. Profilographs of new generation / Е.А. Belkin, V.N. Poyarkov// Materialy IX miedzynarodowej naukowipraktycznej konferencji. Wschodnie partnerstwo - 2013 (07 - 15 wrzesnia 2013 roku) Vol. 31. Fizyka. Przemysl. Nauka I stu-dia. - 2013. - С 8-10.
5. Pat. 2215317 RF. Profilograph / Stepanov Yu.S., Belkin Е.А., Barsukov G.V. - Applic. 08.01.02; published 27.10.03, Bull. № 30.
6. Pat. 2258203 RF. Roentgenoprofilograph / Belkin Е.А. - Apllic. 15.06.04; published 10.08005, Bull. № 22.
