@article{Poyarkov 2016optical, author={Poyarkov , V.. and Belkin , E.. and Markov , O..}, title={OPTICAL CIRCUITS OF HOLOGRAPHIC CONTROL PLANT OF MICRORELIEF FORMATION PROCESS}, journal={Bulletin of Bryansk state technical university}, publisher={Bryansk State Technical University}, year={2016}, pages={137-145}, volume={2016}, issue={3}, }