LDR 00575naa#a2200193#i#450# 001 EN\\bibl\13540 005 20241124132526.7 011 ## _a1999-8775 100 ## _a20160930b2016####ek#y0engy0150####ca 101 0# _aRUS 102 ## _aRU 200 1# _aOPTICAL CIRCUITS OF HOLOGRAPHIC CONTROL PLANT OF MICRORELIEF FORMATION PROCESS _eJournal article 210 1# _aBryansk _cBryansk State Technical University _d2016 215 ## _a8 с. 608 ## _aJournal article _2local 700 #1 _aPoyarkov _gVyacheslav 700 #1 _aBelkin _gEvgeniy 700 #1 _aMarkov _gOleg 856 4# _abstu.editorum.ru _u