TY JOUR TI OPTICAL CIRCUITS OF HOLOGRAPHIC CONTROL PLANT OF MICRORELIEF FORMATION PROCESS KW optical circuit KW profilograph KW roentgeno-profilograph KW microrelief topography KW holographic control JO Bulletin of Bryansk state technical university AU Poyarkov , V.. AU Belkin , E.. AU Markov , O.. PY 2016 IS 2016 PB Bryansk State Technical University