GRNTI 47.61 Приборы для радиотехнических измерений
GRNTI 47.63 Системы и устройства отображения информации
BBK 302 Проектирование
Monitoring of the functioning of the control system for the calibration of nanometry reference measures is carried out on the basis of a previously developed methodology, which includes the construction of the phase space of the system functioning, the construction of acceptable boundaries of the functioning area, and the determination of the current state of the system.
system functioning control, approximation, cognitive model, technological process
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