Abstract and keywords
Abstract (English):
Monitoring of the functioning of the control system for the calibration of nanometry reference measures is carried out on the basis of a previously developed methodology, which includes the construction of the phase space of the system functioning, the construction of acceptable boundaries of the functioning area, and the determination of the current state of the system.

Keywords:
system functioning control, approximation, cognitive model, technological process
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References

1. Antsyferov S.S., Karabanov D.A., Fazilova K.N., Rusanov K.E. Reference gage calibration methods of probe nanometry systems // Journal of Physics: Conference Series. - 2021. -V. 1889. - Issue 4. - P. 042034.

2. Antsyferov S.S., Fazilova K.N., Rusanov K.E. Method for controlling the cognitive systems functioning in non-equilibrium stability mode // Journal of Physics: Conference Series. - 2020. -V. 1679. - Issue 3. - P. 032068.

3. Ancyferov S.S., Fazilova K.N. Metodika ocenki effektivnosti strukturnyh elementov kognitivnyh sistem v real'nom masshtabe vremeni // Nelinejnyj mir. - 2020. - T. 18. - № 3. - S. 33-41.

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