MULTISCAN IDENTIFICATION OF MODELS OF PHYSICAL PROCESSES OF RELAXATION OF CAPACITY OF SEMICONDUCTOR BARRIER STRUCTURES

Vladimir Krylov; Aleksey Bogachev; Timofey Pronin; Aleksey Mischenko

doi:doi:10.30987/conferencearticle_5c19e6a391f660.48288909

MULTISCAN IDENTIFICATION OF MODELS OF PHYSICAL PROCESSES OF RELAXATION OF CAPACITY OF SEMICONDUCTOR BARRIER STRUCTURES

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MULTISCAN IDENTIFICATION OF MODELS OF PHYSICAL PROCESSES OF RELAXATION OF CAPACITY OF SEMICONDUCTOR BARRIER STRUCTURES

Section: MODELING AND IDENTIFICATION OF NONLINEAR DYNAMIC SYSTEMS AND PROCESSES

Proceedings: CAD/EDA, MODELING AND SIMULATION IN MODERN ELECTRONICS. PART 2

UDC 62

CSCSTI 50.51

Russian Library and Bibliographic Classification 302

Russian Trade and Bibliographic Classification 5136

Vladimir Krylov ¹

Aleksey Bogachev ²

Timofey Pronin ³

Aleksey Mischenko ⁴

Author and publication information

Authors:

1. Vladimirskiy gosudarstvennyy universitet im. A.G. i N.G. Stoletovyh
Russian Federation

2. Vladimirskiy gosudarstvennyy universitet im. A.G. i N.G. Stoletovyh
Russian Federation

3. Vladimirskiy gosudarstvennyy universitet im. A.G. i N.G. Stoletovyh
Russian Federation

4. Vladimirskiy gosudarstvennyy universitet im. A.G. i N.G. Stoletovyh
Russian Federation

Type:

Сonference article

DOI:

https://doi.org/10.30987/conferencearticle_5c19e6a391f660.48288909

Pages:

from 67 to 69

Published:

22.12.2018

Subject area:

UDC 62
CSCSTI 50.51
Russian Library and Bibliographic Classification 302
Russian Trade and Bibliographic Classification 5136

Language:

Russian

Keywords:

deep-level transient spectroscopy (DLTS), frequency scan, multiskan

Abstract and keywords

Abstract:
The possibilities of simultaneous use of several frequency scans for parametric identification of models of capacitance relaxation processes of a barrier semiconductor structure are discussed.

Keywords:
deep-level transient spectroscopy (DLTS), frequency scan, multiskan

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References

1. Krylov, V.P. Kompleksnoe modelirovanie fizicheskih processov i apparatnyh preobrazovaniy v relaksacionnoy spektroskopii glubokih urovney / Krylov V.P., Bogachev A.M., Pronin T.Yu., Mischenko A.A. // Sbornik nauchnyh trudov I Mezhdunarodnoy nauchno-prakticheskoy konferencii «SAPR i modelirovanie v sovremennoy elektronike» 22-23 noyabrya 2017 g. / pod red. L.A. Potapova, A.Yu. Drakina. - Bryansk: BGTU, 2017. - S. 9 - 11.

2. Litvinov, V.G. Relaksacionnaya spektroskopiya glubokih urovney i ee primenenie dlya issledovaniya poluprovodnikovyh struktur mikro- i nanoelektroniki / Litvinov V.G., Gudzev V.V., Milovanova O.A., Rybin N.B. // Datchiki i sistemy. - 2009. - №9. - S. 71 - 78.

3. Krylov, V.P. Korrelyacionnaya obrabotka i modelirovanie processov relaksacii emkosti mikroelektronnyh bar'ernyh struktur / Krylov V.P., Bogachev A.M., Mischenko A.A., Pronin T.Yu. // V Mezhdunarodnaya nauchno-tehnicheskaya konferenciya studentov, molodyh uchenyh i specialistov "Energosberezhenie i effektivnost' v tehnicheskih sistemah", g. Tambov 4-6 iyunya 2018 g. - Tambov: TGTU. - S.136 - 137.

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