00614naa#a2200181#i#4500001001500000005001700015011001400032100004100046102000700087200009900094210005400193215001000247608002700257675006200284700003500346700003000381856002100411EN\\bibl\9929920260320224822.5##a2223-4608##a20250530b2025####ek#y0engy0150####ca##aRU1#aDevelopment of pulsed laser deposition process  in nanodimentional structureseJournal article1#aBryanskcBryansk State Technical Universityd2025##a6 с.##aJournal article2local##aиспарением и конденсацией. 539.234#1aShupenevgAlexandr Evgenievich#1aGrigoryantsgAleksandr G.4#abstu.editorum.ru