LDR 00614naa#a2200181#i#450# 001 EN\\bibl\99299 005 20260309181836.1 011 ## _a2223-4608 100 ## _a20250530b2025####ek#y0engy0150####ca 102 ## _aRU 200 1# _aDevelopment of pulsed laser deposition process in nanodimentional structures _eJournal article 210 1# _aBryansk _cBryansk State Technical University _d2025 215 ## _a6 с. 608 ## _aJournal article _2local 675 ## _aиспарением и конденсацией. 539.234 _z 700 #1 _aShupenev _gAlexandr Evgenievich 700 #1 _aGrigoryants _gAleksandr G. 856 4# _abstu.editorum.ru _u