TY CONF TI A MATHEMATICAL MODEL FOR PREDICTING THE RATE OF FORMATION OF A CONDENSATION COATING DURING THERMAL EVAPORATION IN VACUUM KW vacuum coatings KW thermal evaporation KW condensation rate KW mathematical model JO CAD/EDA/SIMULATION IN MODERN ELECTRONICS 2019 AU Inkin, T.A. AU Shtennikov, I.V. PY 2024 PB Bryansk State Technical University