%0 Conference Article %T MULTISCAN IDENTIFICATION OF MODELS OF PHYSICAL PROCESSES OF RELAXATION OF CAPACITY OF SEMICONDUCTOR BARRIER STRUCTURES %A Krylov, V.P. %A Bogachev, A.M. %A Pronin, T.Y. %A Mischenko, A.A. %K %J CAD/EDA/Simulation in Modern Electronics %D 2024 %P 2 %I Bryansk State Technical University