TY JOUR TI Development of pulsed laser deposition process in nanodimentional structures KW pulsed laser deposition KW thin films KW diamond-like structures KW high-temperature superconductor KW film thermoelectric element KW topological insulator JO Science intensive technologies in mechanical engineering AU Shupenev, A.E. AU Aleksandr G., G.G. PY 2025 IS 2025 PB Bryansk State Technical University