@article{Adamov2024investigating,
author={Adamov, A.A. and Golovko, A.S. and Malakhanov, A.A. and Vasil'eva, Y.O. and Pavlov, A.V.},
title={INVESTIGATING THE REMOVAL RATE OF PYROGENIC SiO2  BY PLASMA CHEMICAL ETCHING},
journal={Automation and modeling in design and management},
publisher={Bryansk State Technical University},
year={2024},
pages={4-11},
volume={2024},
issue={4},
}