%0 Journal Article %T APPLYING SCANNING ELECTRON MICROSCOPY IN REVERSE ENGINEERING OF ELECTRONIC COMPONENT BASE %A Malakhanov, A.A. %A Pugachev, A.A. %A Markova, V.K. %K scanning electron microscopy, section, gate dielectric, busbar, dustiness coefficient, reverse engineering %J Automation and modeling in design and management %D 2024 %N 2024 %P 8 %I Bryansk State Technical University