TY  JOUR
TI  Thickness distribution peculiarities of DLS –films obtained by method of pulse laser precipitation
KW  diamond-like films
KW  DLS
KW  thin films
KW  pulse laser precipitation
KW  excimer laser
KW  ellipsometry
KW  thin film thickness
JO  Science intensive technologies in mechanical engineering
AU  Shupenev, A.E.
AU  Krivosheev, A.V.
AU  Ponomarenko, S.L.
PY  2020
IS  2020
PB  Bryansk State Technical University