%0 Journal Article
%T Thickness distribution peculiarities of DLS –films obtained by method of pulse laser precipitation
%A Shupenev, A.E.
%A Krivosheev, A.V.
%A Ponomarenko, S.L.
%K diamond-like films, DLS, thin films, pulse laser precipitation, excimer laser, ellipsometry, thin film thickness
%J Science intensive technologies in mechanical engineering
%D 2020
%N 2020
%P 5
%I Bryansk State Technical University