@article{Shupenev2020thickness, author={Shupenev, A.E. and Krivosheev, A.V. and Ponomarenko, S.L.}, title={Thickness distribution peculiarities of DLS –films obtained by method of pulse laser precipitation}, journal={Science intensive technologies in mechanical engineering}, publisher={Bryansk State Technical University}, year={2020}, pages={35-40}, volume={2020}, issue={2}, }